POG Precision Optics Gera

Customized Microstructures

Microlithography

We are your partner for sophisticated, customized optical microstructures.

Exposure of standard glass substrates, ceramic substrates, special substrates, overlapping of several structure layers

Projection copy

resolution capacity (µm) 1.0 1.2 1.4 3.0
image field size (mm2) 12x12 16x16 20x20 ø 80

Contact copy

Lift Off Process

Substrate

Substrate with photoresist

Exposure with mask and UV-light (contact copy)

Substrate with developed resist mask

Chrome coating or sputtering

Substrate with lifted metal structure

Wet-etch Process

Substrate

Metalized Substrate (Chrome)

Metalized Substrate with photoresist

Exposure with mask and UV-light (contact copy)

Metalized substrate with resist mask after development

Substrate with etched metal structure

Requests and questions

Find your personal contact.
Main phone: +49 365 77393 00
US phone: 941-803-4927
Email: info@pog.eu

Or use our online contact form.