Etching process Substrate Metallized substrate (chrome coating) Metallized substrate with photo resist Exposure with mask and UV light (contact copy) Metallized substrate with developed resist mask Substrate with etched metallic pattern Microstructures: Lift-Off Process26. May 2021Microstructures: Variable ND Filters, Geometrical Beamsplitters26. May 2021Optical Coatings Test Equipment26. May 2021Microstructures: Plasma etching vs. HF etching for illuminated reticles26. May 2021DAkkS Calibration21. May 2021Microstructures Mask Production25. February 2021
