Lift-Off-Process Substrate Substrate with photo resist Exposure with mask and UV light (contact copy) Substrate with developed resist mask Coating or sputtering of chrome Substrate with lifted metallic pattern Microstructures: etching process metallic layers1. June 2021Microstructures: Variable ND Filters, Geometrical Beamsplitters26. May 2021Optical Coatings Test Equipment26. May 2021Microstructures: Plasma etching vs. HF etching for illuminated reticles26. May 2021DAkkS Calibration21. May 2021Microstructures Mask Production25. February 2021
